Ion Beam Techniques for the Analysis of Light Elements in Thin Films, Including Depth Profiling (IAEA Tecdoc Series)

This publication highlights the achievements of a Coordinated Research Project (CRP) in promoting the potential of accelerator-based nuclear techniques of analysis for light elements in thin films. The objectives of this CRP were to develop a coordinated research effort between accelerator laboratories and materials science research groups in order to assist and promote the development of quality assurance methods, to evaluate databases of the parameters needed for quantitative analysis, and to develop and apply techniques to selected problems concerning the surface modification of materials and the production of thin films. Through various case studies, this publication assesses and demonstrates the effectiveness of accelerator-based nuclear techniques for analysis to provide valuable data and knowledge not readily accessible using other methods.