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Advanced Nanoscale ULSI Interconnects : Fundamentals and Applications

Shacham-Diamand, Y. (EDT)/ Osaka, T. (EDT)/ Datta, M. (EDT)
921.00 MYR
Member Price
828.90
English

Product Description

In Advanced ULSI interconnects - fundamentals and applications we bring a comprehensive description of copper-based interconnect technology for ultra-lar- scale integration (ULSI) technology for integrated circuit (IC) application.

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