Introductory MEMS : Fabrication and Applications (2010. XV, 444 S. 25 SW-Abb., 25 Farbabb., 20 Tabellen. 235 mm)

595.92 MYR
Member Price
536.33
English

Product Description

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

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