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Lecture Notes on Principles of Plasma Processing (PAP/CDR)

Name: Lecture Notes on Principles of Plasma Processing (PAP/CDR)
Brand: Plenum Pub Corp
SKU: 00000_00000_00000_00000
Price: 921.00 MYR
Availability: InStock

Chen, Francis F./ Chang, Jane P.

921.00 MYR

Member Price

828.90

English

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Product Description

Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas.

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Publisher

Plenum Pub Corp

Publication Date

Feb 2003

ISBN

9780306474972

Pages

208

Item Type

Book

Format

Paperback

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Lecture Notes on Principles of Plasma Processing (PAP/CDR)

Product Description

Available to Order

Lecture Notes on Principles of Plasma Processing (PAP/CDR)

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